High Precision Manipulator HPM 100
The HPM High Precision Manipulators are mounted on a DN 160CF flange and come with XY-strokes of 12.5 mm and 25 mm (full square range) respectively, and up to 1000 mm Z-Stroke.
Motion is possible via large barrel types micrometers with 5 microns graduations. These are easily interchangeable with stepper motor modules, while manual operation is still possible with removed motors.
HPM 100, +/- 12.5 mm XY-Manipulator
|
Design |
DN 160CF flange mounted XY-motion module |
|
Stroke (full square range) |
+/- 12.5 mm |
|
Resolution |
5 μm (manual) - 0.5 μm (motorized) |
|
Repeatability |
5 μm (manual) - 1 μm (motorized) |
|
Max. speed |
2 mm/sec |
HPM 300, +/- 25 mm XY-Manipulator, 1000 mm Z-Strok
|
Design |
DN 160CF flange mounted XY-motion module |
|
Stroke (full square range) |
+/- 25 mm XY, 1000 mm Z |
|
Resolution |
5 μm (manual) - 0.5 μm (motorized) |
|
Repeatability |
5 μm (manual) - 1 μm (motorized) |
|
Max. speed |
2 mm/sec |
HPM 200, +/- 25 mm XY-Manipulator
|
Design |
DN 160CF flange mounted XY-motion module |
|
Stroke (full square range) |
+/- 25 mm |
|
Resolution |
5 μm (manual) - 0.5 μm (motorized) |
|
Repeatability |
5 μm (manual) - 1 μm (motorized) |
|
Max. speed |
2 mm/sec |
