Large Radial Distribution System
-
Large UHV-distribution chamber for up to eight (8) UHV-chambers with horizontal transportation (powders)
-
Extension with second or more UHV-distribution chambers possible (®ESCA 2D)
-
True UHV-conditions during transportation (p<1x10-9 mbar)
-
Fast transfer < 45 seconds
-
Transfer of large (up to 8” diameter) and heavy sample (> 1 kg) possible
-
No cross-contamination between different chambers
-
All chambers from ®UHV L can be used (full compatibility)
-
Different projects can run in parallel - high through-put
-
Easy service and maintenance work
-
Sharing of resources (surface analysis, load-lock, sample preparation, etc.)
-
High flexibility for future extensions or new research areas
-
Only one rotary motion feedthrough for rotation, translation and sample delivery/pickup
-
Small radial distribution chamber (SD) for UHV-transport of sample between 5 chambers
-
Fast-entry lock-lock chamber (optional with cooling and detachable laminar-flow or glovebox)
-
Sample storage for up to six (6) sample holder with heating in one storage position (option)
-
Sample preparation chamber (with up to four levels including LEED port possible) with manipulator, heating and cooling
-
VT-SPM chamber with sample transfer, pre-cooling and heating. SPM can be replaced by e. g. IR-chamber
