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Linear Vacuum System

• Linear UHV-system for up to three (3) UHV-chambers (plus additional park station)
• Transport by rack-and-pinion driven linear motion feedthrough, second rotation optional (for perpendicular manipulators)
• Standard setup surface analysis chamber (ESCA, SIMS, End-station for synchrotron, etc.) and load-lock
• Sample preparation chamber and sample storage optional
• Full upgrade compatible to UHV SD and UHV D - all chambers can be used !
• Pumping system custom design like combination of turbo molecular pumps, ion pumps, cryopumps, TSP, etc.)

Application example:

• Surface analysis chamber with SES 2002, x-ray source and x-ray monochromator and high stable frame with vibration isolation
• Additional preparation chamber with manipulator, heating and cooling and frame with thermal isolation
• Fast-entry sample load lock for one or up to six sample holders
• Mechanical rack-and-pinion coupled linear transfer (no-magnets, good control, can be operated by one person)